I could not resist

Resists for Electron Beam Lithography (EBL)


Playlists: 'rc3' videos starting here / audio

Photoresists are one of the essential ingredients for chip manufacturing and micro/nano engineering.
We will show how we’re using them in a DIY Electron Beam Lithography set-up and how you’re able to cook your own cheap resists and mix your own developers.

Resists? What's that?

EBL? What's that?

DIY cooking of PMMA based resists

Composition of different developers


The EBL exposure process

Stuff comes together

More Examples

Thanks & Credits

Q & A


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