Hacking on the Nanoscale

Dual Beam Devices for Rapid Prototyping and Reverse Engineering

Lorenz

Dual beam systems are a research and development tool widely used in semiconductor industry. They integrate a scanning electron microscope with a focused ion beam and allow to image, remove, and deposit nanometer size structures. The lecture introduces the basic principles, shows application examples, and explains how these devices can be used for hacking on the hardware level.

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